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ULVAC, Inc.

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  2013 Application Ranking      112th  publications: 434 上昇2012: 135th  339)

  2013 Acquisition Ranking      104th  registrations: 384 上昇2012: 106th  389)

(update:Feb 3, 2023)

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公報番号発明の名称公報発行日備考
特開 2013-257528 Exposure device Dec 26, 2013
特開 2013-256001 Multi-nozzle plate and its manufacturing method and electrostatic discharge type printing device Dec 26, 2013
特開 2013-258319 How to form an ultra-shallow joint Dec 26, 2013
特開 2013-253298 Target unit manufacturing method and target unit manufacturing equipment Dec 19, 2013
特開 2013-247150 Plasma processing equipment Dec 9, 2013
特開 2013-247235 Board position calculation device, board position calculation method, and board position calculation program Dec 9, 2013
特開 2013-247167 Dry etching equipment Dec 9, 2013
特開 2013-247157 Dry etching equipment Dec 9, 2013
特開 2013-245739 Gate valve Dec 9, 2013
特開 2013-247161 Dry etching equipment Dec 9, 2013
特開 2013-241647 Sputtering method Dec 5, 2013
特開 2013-240168 Series resonance type DC / DC converter Nov 28, 2013
特開 2013-237913 Sputtering equipment and sputtering method Nov 28, 2013
特開 2013-237026 Hardening device and hardening method of metal oxide film Nov 28, 2013
特開 2013-237929 Manufacturing method of evaporative material Nov 28, 2013

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2013-257528 2013-256001 2013-258319 2013-253298 2013-247150 2013-247235 2013-247167 2013-247157 2013-245739 2013-247161 2013-241647 2013-240168 2013-237913 2013-237026 2013-237929

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