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Tokyo Electron Limited

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  2011 Application Ranking      62th  publications: 621 下降2010: 57th  692)

  2011 Acquisition Ranking      41th  registrations: 739 下降2010: 39th  580)

(update:Jul 29, 2021)

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公報番号発明の名称公報発行日備考
特許 4847496 Vapor deposition source unit, vapor deposition method, controller for vapor deposition source unit, and film forming apparatus Dec 28, 2011
特許 4845668 Composite piping and coating/developing equipment equipped with composite piping Dec 28, 2011
特許 4845204 Coating film forming apparatus and coating film forming method Dec 28, 2011
特許 4849004 Heating device, heating method and coating, developing device, and storage medium Dec 28, 2011
特許 4846190 Plasma processing apparatus and control method thereof Dec 28, 2011
特許 4845385 Film forming equipment Dec 28, 2011
特許 4846943 Wafer transfer tool and wafer transfer system Dec 28, 2011
特許 4845782 Film forming material Dec 28, 2011
特許 4847046 Heat treatment equipment Dec 28, 2011
特許 4847909 Plasma processing method and apparatus Dec 28, 2011
特許 4847332 Method and system for processing a dielectric film Dec 28, 2011
特許 4848376 Supercritical fluid homogenization method and system for high pressure processing system Dec 28, 2011 共同出願
特許 4844261 Film forming method, film forming apparatus, and storage medium Dec 28, 2011
特許 4844167 Cooling block and plasma processing device Dec 28, 2011
特許 4846008 Development processing equipment and development processing method Dec 28, 2011

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4847496 4845668 4845204 4849004 4846190 4845385 4846943 4845782 4847046 4847909 4847332 4848376 4844261 4844167 4846008

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