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Tokyo Electron Limited

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  2012 Application Ranking      53th  publications: 714 上昇2011: 62th  621)

  2012 Acquisition Ranking      37th  registrations: 902 上昇2011: 41th  739)

(update:Jan 20, 2021)

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公報番号発明の名称公報発行日備考
特開 2012-256643 Phase change memory and method for manufacturing phase change memory Dec 27, 2012
特開 2012-256907 Method and system for selective etching of dielectric material with respect to silicon Dec 27, 2012
特開 2012-256645 Substrate transport container opening/closing device, lid opening/closing device, and semiconductor manufacturing device Dec 27, 2012
特開 2012-256743 Liquid processing apparatus and liquid processing method Dec 27, 2012
特開 2012-255203 Film forming method and film forming apparatus Dec 27, 2012
特開 2012-256660 Inductively coupled plasma antenna unit and inductively coupled plasma processing apparatus Dec 27, 2012
特開 2012-256745 Liquid processing apparatus and liquid processing method Dec 27, 2012
特開 2012-253376 Method and apparatus for forming amorphous carbon film Dec 20, 2012
特開 2012-253313 Film forming apparatus, film forming method and storage medium Dec 20, 2012
特開 2012-251178 Film forming apparatus, film forming speed calculation method, film forming method, and organic light emitting device manufacturing method Dec 20, 2012
特開 2012-248631 Temperature measuring device, temperature measuring method, storage medium and heat treatment device Dec 13, 2012
特開 2012-248759 Method for manufacturing semiconductor device Dec 13, 2012
特開 2012-248695 Substrate warp removing device, substrate warp removing method, and storage medium Dec 13, 2012
特開 2012-247368 Board inspection device, board inspection method and storage medium Dec 13, 2012
特開 2012-248788 Plasma processing apparatus and gas supply method thereof Dec 13, 2012

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2012-256643 2012-256907 2012-256645 2012-256743 2012-255203 2012-256660 2012-256745 2012-253376 2012-253313 2012-251178 2012-248631 2012-248759 2012-248695 2012-247368 2012-248788

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