Patent Ranking in Japan - Applicant details - Japanese version

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Tokyo Electron Limited

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  2013 Application Ranking      60th  publications: 712 下降2012: 53th  714)

  2013 Acquisition Ranking      45th  registrations: 796 下降2012: 37th  902)

(update:Jan 21, 2021)

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公報番号発明の名称公報発行日備考
特許 5378586 Priming processing method and priming processing apparatus Dec 25, 2013
特許 5378447 Coating and developing device Dec 25, 2013
特許 5374961 Coating, developing device, method for cleaning coating arm of coating and developing device, and storage medium Dec 25, 2013
特許 5374079 Inspection contact structure Dec 25, 2013
特許 5374039 Substrate processing method, substrate processing apparatus, and storage medium Dec 25, 2013
特許 5379589 Vacuum suction pad, transfer arm and substrate transfer device Dec 25, 2013
特許 5378706 Plasma processing apparatus and processing gas supply apparatus used therefor Dec 25, 2013
特許 5375871 Liquid processing apparatus, liquid processing method, storage medium storing computer program Dec 25, 2013
特許 5379773 Plating apparatus, plating method, and recording medium recording plating program Dec 25, 2013
特許 5374590 Sputtering equipment Dec 25, 2013
特許 5374749 Method of forming insulating film, computer-readable storage medium and processing system Dec 25, 2013
特許 5374748 Method of forming insulating film, computer-readable storage medium and processing system Dec 25, 2013
特許 5379732 Substrate processing equipment Dec 25, 2013
特許 5376816 Microwave introduction mechanism, microwave plasma source, and microwave plasma processing apparatus Dec 25, 2013
特許 5375853 Film forming apparatus, film forming method and storage medium Dec 25, 2013

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5378586 5378447 5374961 5374079 5374039 5379589 5378706 5375871 5379773 5374590 5374749 5374748 5379732 5376816 5375853

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Patent Ranking in Japan

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