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Tokyo Electron Limited

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  2016 Application Ranking      61th  publications: 616 下降2015: 56th  677)

  2016 Acquisition Ranking      49th  registrations: 561 上昇2015: 51th  433)

(update:Aug 2, 2021)

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Publication numberTitle of the InventionPublic. dateRemarks
2016-541119 DC overlay freeze Dec 28, 2016
2016-541125 Use of Graphoepitaxially Guided Self-Assembly to Cut Lines Accurately Dec 28, 2016
A 2016-222954 Method for forming metal film Dec 28, 2016
A 2016-225018 Gas treatment apparatus and multi-split shower head used therefor Dec 28, 2016
A 2016-225047 Plasma processing device Dec 28, 2016
A 2016-225203 Plasma processing device Dec 28, 2016
A 2016-225258 Plasma processing device Dec 28, 2016
A 2016-225356 Method for manufacturing semiconductor device Dec 28, 2016
A 2016-225396 Metal film stress reduction method and metal film deposition method Dec 28, 2016
A 2016-225436 Etching method Dec 28, 2016
A 2016-225437 Etching method Dec 28, 2016
A 2016-225439 Plasma processing apparatus and substrate peeling detection method Dec 28, 2016
A 2016-225506 Surface modification device, bonding system, surface modification method, program and computer storage medium Dec 28, 2016
A 2016-225521 Substrate processing apparatus and substrate processing method Dec 28, 2016
A 2016-225567 Cleaning method Dec 28, 2016

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2016-541119 2016-541125 2016-222954 2016-225018 2016-225047 2016-225203 2016-225258 2016-225356 2016-225396 2016-225436 2016-225437 2016-225439 2016-225506 2016-225521 2016-225567

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特許事務所紹介 IP Force 特許事務所紹介

IVY(アイビー)国際特許事務所

愛知県名古屋市天白区中平三丁目2702番地 グランドールS 203号 特許・実用新案 意匠 商標 外国特許 外国商標 訴訟 鑑定 コンサルティング 

あいわ特許業務法人(特許事務所)

〒104-0045 東京都中央区築地1-12-22 コンワビル4F 特許・実用新案 意匠 商標 外国特許 外国意匠 外国商標 訴訟 鑑定 コンサルティング 

ひので総合特許事務所

〒330-0846 埼玉県さいたま市大宮区大門町3-205 ABCビル401 特許・実用新案 意匠 商標 外国特許 外国意匠 外国商標 訴訟 鑑定 コンサルティング