Patent Ranking in Japan - Applicant details - Japanese version

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Tokyo Electron Limited

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  2013 Application Ranking      60th  publications: 712 下降2012: 53th  714)

  2013 Acquisition Ranking      45th  registrations: 796 下降2012: 37th  902)

(update:Sep 22, 2021)

2011  2012  2014  2015  2016  2017  2018  2019  2020  2021 

公報番号発明の名称公報発行日備考
特許 5374853 Plasma processing equipment Dec 25, 2013
特許 5379732 Substrate processing equipment Dec 25, 2013
特許 5377587 Antenna, plasma processing device and plasma processing method Dec 25, 2013
特許 5379773 Plating apparatus, plating method, and recording medium recording plating program Dec 25, 2013
特許 5378449 Coating and developing equipment Dec 25, 2013
特許 5375852 Film forming apparatus, film forming method and storage medium Dec 25, 2013
特許 5374039 Substrate processing method, substrate processing apparatus, and storage medium Dec 25, 2013
特許 5376023 Mounting table structure and heat treatment equipment Dec 25, 2013
特許 5377463 Heat treatment equipment Dec 25, 2013
特許 5375793 Liquid treatment equipment Dec 25, 2013
特許 5375853 Film forming apparatus, film forming method and storage medium Dec 25, 2013
特許 5378448 Coating, developing equipment and its method Dec 25, 2013
特許 5377915 Inspection equipment and inspection method Dec 25, 2013
特許 5373669 Manufacturing method of semiconductor devices Dec 18, 2013
特許 5372895 Substrate processing method Dec 18, 2013

16-30 (total:794)

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5374853 5379732 5377587 5379773 5378449 5375852 5374039 5376023 5377463 5375793 5375853 5378448 5377915 5373669 5372895

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