Patent Ranking in Japan - Applicant details - Japanese version

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Tokyo Electron Limited

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  2013 Application Ranking      60th  publications: 712 下降2012: 53th  714)

  2013 Acquisition Ranking      45th  registrations: 796 下降2012: 37th  902)

(update:Jun 18, 2021)

2011  2012  2014  2015  2016  2017  2018  2019  2020  2021 

公報番号発明の名称公報発行日備考
特許 5367000 Plasma processing equipment Dec 11, 2013
特許 5363766 Plasma processing device A storage medium that stores the system control device, plasma processing system control method, and control program. Dec 11, 2013
特許 5363213 Anomaly detection system, anomaly detection method, storage medium and substrate processing equipment Dec 11, 2013
特許 5362503 Cleaning / drying processing method, cleaning / drying processing equipment, and recording medium Dec 11, 2013
特許 5366235 Semiconductor manufacturing equipment, semiconductor manufacturing equipment and storage media Dec 11, 2013 共同出願
特許 5367522 Plasma processing equipment and shower head Dec 11, 2013
特許 5357710 Board processing method, board processing device, recording medium on which programs are recorded Dec 4, 2013
特許 5358651 Heat treatment method and heat treatment equipment Dec 4, 2013
特許 5358436 Plasma processing method and plasma processing equipment Dec 4, 2013
特許 5356390 Microwave plasma generator and microwave plasma processing device Dec 4, 2013
特許 5357487 Silicon oxide film forming method, computer-readable storage medium and plasma oxidation treatment device Dec 4, 2013
特許 5361847 A substrate processing method, a recording medium on which a program for executing this substrate processing method is recorded, and a substrate processing apparatus. Dec 4, 2013
特許 5358366 Substrate processing equipment and method Dec 4, 2013
特許 5359286 Supercritical processing equipment, substrate processing system and supercritical processing method Dec 4, 2013
特許 5357486 Plasma processing equipment Dec 4, 2013

46-60 (total:794)

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5367000 5363766 5363213 5362503 5366235 5367522 5357710 5358651 5358436 5356390 5357487 5361847 5358366 5359286 5357486

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Patent Ranking in Japan

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