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Tokyo Electron Limited

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  2013 Application Ranking      60th  publications: 712 下降2012: 53th  714)

  2013 Acquisition Ranking      45th  registrations: 796 下降2012: 37th  902)

(update:Jun 18, 2021)

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公報番号発明の名称公報発行日備考
特許 5351317 Board processing equipment Nov 27, 2013
特許 5353905 Plasma processing equipment and oxide film forming method Nov 27, 2013
特許 5348083 Coating, developing equipment, coating, developing method and storage medium Nov 20, 2013
特許 5349445 Plasma processing equipment and methods, as well as computer-readable storage media Nov 20, 2013
特許 5346699 A method for forming a Ge-Sb-Te film, a storage medium, and a method for manufacturing a PRAM. Nov 20, 2013
特許 5349741 Information processing equipment, semiconductor manufacturing systems, information processing methods, programs, and recording media Nov 20, 2013
特許 5348290 Substrate processing equipment, substrate processing method and storage medium Nov 20, 2013
特許 5348919 Electrode structure and substrate processing equipment Nov 20, 2013
特許 5344824 Resist pattern forming method and recording medium Nov 20, 2013
特許 5348848 Plasma processing equipment Nov 20, 2013
特許 5347294 Film formation equipment, film formation method and storage medium Nov 20, 2013
特許 5347868 Mounting table structure and plasma film forming equipment Nov 20, 2013
特許 5349066 Etching method for silicon-containing antireflection coating layer with reduced CD bias Nov 20, 2013
特許 5345167 Board holding device Nov 20, 2013
特許 5348277 Substrate cleaning equipment, substrate cleaning method and storage medium Nov 20, 2013

91-105 (total:794)

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5351317 5353905 5348083 5349445 5346699 5349741 5348290 5348919 5344824 5348848 5347294 5347868 5349066 5345167 5348277

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